Talos

Point-of-use contamination control system that chemically destroys airborne molecular contaminants in semiconductor fabs.

aerogensystems.com

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Talos is Aerogen Systems' modular contamination control reactor that destroys airborne molecular contaminants at the source wherever wafers are exposed, rather than trapping them in filters. A single run reduces VOC contamination from ambient to below 1 ppb — 7N purity — in 16 minutes, outperforming UHP nitrogen purge by 10–100x. CleanPipe provides sealed wafer transport between manufacturing steps, creating Talos-purified control volumes throughout a fab and eliminating cleanroom dependency. Talos is a product of Aerogen Systems.

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Product details

Product kind
Hardware
Pricing model
Other
Free tier
No
Open source
No
semiconductor fab contamination controlwafer yield improvementairborne molecular contamination reductioncleanroom cost reductionVOC destruction